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Motorola Delivers Volume Shipments of Low-K Microprocessors
Advanced Low-K Process Helps PowerPC®
Microprocessors Improve Performance and Reduce Power Consumption
AUSTIN, Texas - June 2, 2003
-- Motorola, Inc. (NYSE:MOT) has delivered some of the first volume shipments of microprocessors produced using a low-k insulating dielectric during the metallization process. Motorola has applied this process to PowerPC microprocessor products including the G4 PowerPC processor, Motorola's MPC 7455 and the recently introduced 7457. Products manufactured with this method run up to 20 percent faster and at lower power than those made without it while maintaining high yields and reliability. This manufacturing breakthrough is a part of Motorola's ongoing commitment to high performance products. Motorola has led the industry in volume shipments of Silicon-on-insulator (SOI) technology since fourth quarter 2001.
"This advanced technology is a critical differentiator for our high performance microprocessors," said Dr. Claudine Simson, corporate vice president and chief technology officer for DigitalDNATM Laboratories, Motorola's Semiconductor Products Sector. "It provides our customers exceptional product capabilities: extremely high speeds, competitive power consumption and best-in class reliability."
Low-k dielectric thin films in copper interconnects have been one of the hottest technologies over the past couple years. But few companies have brought products to market with the technology. The "k" refers to a dielectric characteristic of the insulating material between metal lines. The lower the k value, the lower the capacitive coupling between neighboring signal lines, i.e. faster switching speeds.
Scientists at Motorola's Dan Noble Center in Austin, Texas originally refined the low-k process at the 0.13 micron technology node. The process was reverse transferred into a high performance 0.18 micron SOI process for immediate product shipments. Motorola has been shipping products manufactured at the 0.18 micron SOI process since the first quarter 2003 and plans to ship at 0.13 micron later this year.
"Motorola was one of the first semiconductor manufacturers to introduce copper - that's a big advantage in working with low-k materials," said Dirk Wristers, director of device integration in Motorola's MOS-13 wafer fab. "Many other companies are trying to introduce several new materials at once, which is a huge challenge. We've solved the problems associated with copper interconnects and have been shipping products since 1999. This means we have been able to focus our resources on solving the challenges unique to low-k dielectrics."
Low-k dielectrics breakthrough
Motorola has developed several novel approaches to overcome the technical challenges associated with successfully integrating a low-k dielectric into its metallization process. The process utilizes a hydrogenated silicon oxycarbide (SICOH) film. While many semiconductor manufacturers are researching ways to implement SICOH-based solutions, Motorola was among the first to get volume microprocessor production to the marketplace using this SICOH process. Motorola-produced these products on 200 mm wafers at its Mos-13 wafer fab IN Austin, Texas.
About Motorola's Semiconductor Products Sector
As the world's #1 producer of embedded processors, Motorola's Semiconductor Products Sector creates DigitalDNATM system-on-chip solutions for a connected world. Our strong focus on wireless communications and networking enables customers to develop smarter, simpler, safer and synchronized products for the person, work team, home and automobile. Motorola's worldwide semiconductor sales were $5.0 billion (USD) in 2002. For more information please visit http://www.motorola.com/semiconductors
About Motorola
Motorola, Inc. (NYSE:MOT) is a global leader in wireless, automotive and broadband communications. Sales in 2002 were $27.3 billion. Motorola is a global corporate citizen dedicated to ethical business practices and pioneering important innovations that make things smarter and life better, honored traditions that began when the company was founded 75 years ago this year. Sales of Motorola China in 2002 were $5.7billion. For more information, please visit: www.motorola.com.cn
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